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Thesis

Microscope mode secondary ion mass spectrometry imaging

Abstract:

Mass spectrometry imaging (MSI) is a powerful, label-free technique for visualizing the spatial distribution of chemical species on surfaces, with spatial resolution reaching the micron or sub-micron scale. Among various MSI modalities, secondary ion mass spectrometry (SIMS) stands out for its superior spatial resolution and capability to analyze metal multilayer (such as semiconductors) with high depth sensitivity. However, SIMS typically offers a more limited mass range compared to matrix-a...

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Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Sub-Department of Physical and Theoretical Chemistry
Role:
Author

Contributors

Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Role:
Supervisor
ORCID:
0000-0003-3421-0850


DOI:
Type of award:
DPhil
Level of award:
Doctoral
Awarding institution:
University of Oxford


Language:
English
Keywords:
Subjects:
Pubs id:
2407723
Local pid:
pubs:2407723
Deposit date:
2026-04-01
ARK identifier:


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