Thesis
Microscope mode secondary ion mass spectrometry imaging
- Abstract:
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Mass spectrometry imaging (MSI) is a powerful, label-free technique for visualizing the spatial distribution of chemical species on surfaces, with spatial resolution reaching the micron or sub-micron scale. Among various MSI modalities, secondary ion mass spectrometry (SIMS) stands out for its superior spatial resolution and capability to analyze metal multilayer (such as semiconductors) with high depth sensitivity. However, SIMS typically offers a more limited mass range compared to matrix-a...
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- Files:
-
-
(Preview, Dissemination version, pdf, 49.9MB, Terms of use)
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Authors
Contributors
+ Brouard, M
- Institution:
- University of Oxford
- Division:
- MPLS
- Department:
- Chemistry
- Role:
- Supervisor
- ORCID:
- 0000-0003-3421-0850
- DOI:
- Type of award:
- DPhil
- Level of award:
- Doctoral
- Awarding institution:
- University of Oxford
- Language:
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English
- Keywords:
- Subjects:
- Pubs id:
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2407723
- Local pid:
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pubs:2407723
- Deposit date:
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2026-04-01
- ARK identifier:
Terms of use
- Copyright holder:
- Yifeng Jia
- Copyright date:
- 2025
- Notes:
- Development of high throughput microscope mode secondary ion mass spectrometry imaging and High-resolution microscope-mode secondary ion mass spectrometry imaging are derived from this thesis.
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