Functional nanolayer dielectrics for improved semiconductor devices

Thesis

Negatively charged dielectric films have significant potential to improve the performance of semiconductor devices by modifying its carrier densities. Such charges can be embedded by injecting electrons to dielectric defects, which can be intentionally engineered to control their density and location for specific applications. Understanding the interactions at the charged dielectrics and semiconductor interfaces is also essential for effective integration into devices.

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Authors: Niu, X

• DOI: 10.5287/ora-9oyd4pqp9
• Type of award: DPhil
• Level of award: Doctoral
• Awarding institution: University of Oxford
• Language: English
• Keywords: solar cells; 2D MoS2; dielectrics; field-effect transistors; silicon; dielectric defects; surface passivation; doping
• Subjects: Interfaces (Physical sciences); Field-effect transistors; Silicon solar cells