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Journal article

Calculation and experimental verification of the acoustic stress at GHZ frequencies in SAW resonators.

Abstract:

High power applications of Surface Acoustic Wave (SAW) devices may lead to acoustomigration in their thin metal electrodes, which deteriorates the performance or may even destroy the SAW device. It is confirmed in this paper that the mechanism of acoustomigration is caused by the SAW-induced stress in the metal. The quantitative calculation of this stress will be shown in detail, starting from the widely used P-Matrix model as a standard analysis tool. The combination with the partial wave me...

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Publication status:
Published

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Publisher copy:
10.1109/TUFFC.2004.1367484

Authors


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Institution:
University of Oxford
Division:
MPLS
Department:
Physics
Sub department:
Condensed Matter Physics
Role:
Author
Journal:
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volume:
51
Issue:
11
Pages:
1437-1448
Publication date:
2004-11-01
DOI:
EISSN:
1525-8955
ISSN:
0885-3010
Source identifiers:
151440
Language:
English
Pubs id:
pubs:151440
UUID:
uuid:f804e8de-b726-4638-aba6-f865a97c275f
Local pid:
pubs:151440
Deposit date:
2012-12-19

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