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Journal article

A microscopic view on acoustomigration.

Abstract:

Stress-induced material transport in surface acoustic wave devices, so-called acoustomigration, is a prominent failure mechanism, especially in high-power applications. We used scanning probe microscopy techniques to study acoustomigration of metal structures in-situ, i.e., during the high-power loading of the device. Scanning acoustic force microscopy (SAFM) allows for the simultaneous measurement of the acoustic wavefield and the topography with submicron lateral resolution. High-resolution...

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Publication status:
Published

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Publisher copy:
10.1109/TUFFC.2005.1516031

Authors


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Institution:
University of Oxford
Department:
Oxford, MPLS, Physics, Condensed Matter Physics
Role:
Author
Journal:
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volume:
52
Issue:
9
Pages:
1584-1593
Publication date:
2005-09-05
DOI:
EISSN:
1525-8955
ISSN:
0885-3010
URN:
uuid:f5717c26-670a-4468-b5a5-8e5cfde0e492
Source identifiers:
151441
Local pid:
pubs:151441
Language:
English

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