Journal article
A microscopic view on acoustomigration.
- Abstract:
-
Stress-induced material transport in surface acoustic wave devices, so-called acoustomigration, is a prominent failure mechanism, especially in high-power applications. We used scanning probe microscopy techniques to study acoustomigration of metal structures in-situ, i.e., during the high-power loading of the device. Scanning acoustic force microscopy (SAFM) allows for the simultaneous measurement of the acoustic wavefield and the topography with submicron lateral resolution. High-resolution...
Expand abstract
- Publication status:
- Published
Actions
Authors
Bibliographic Details
- Journal:
- IEEE transactions on ultrasonics, ferroelectrics, and frequency control
- Volume:
- 52
- Issue:
- 9
- Pages:
- 1584-1593
- Publication date:
- 2005-09-01
- DOI:
- EISSN:
-
1525-8955
- ISSN:
-
0885-3010
Item Description
- Language:
- English
- Pubs id:
-
pubs:151441
- UUID:
-
uuid:f5717c26-670a-4468-b5a5-8e5cfde0e492
- Local pid:
- pubs:151441
- Source identifiers:
-
151441
- Deposit date:
- 2012-12-19
Terms of use
- Copyright date:
- 2005
Metrics
If you are the owner of this record, you can report an update to it here: Report update to this record