Conference item

Structural modelling of nano-amorphous Si-O-N films in silicon nitride ceramics

Abstract:: In order to obtain a detailed computational description of the structure and fundamental properties of silicon oxynitride films as thin as 1mn in Si3N4 ceramics, a reliable and transferable many-body inter-atomic potential has been developed for Si-N-O systems and used to perform molecular dynamic (MD) simulations. The modelling results of radial distribution function (RDF) are well compared with experimental measured ones for the inter-granular glassy films (IGFs). The predicted variation of bond-order around Si atoms allow to compare with spatially resolved, electron energy loss spectroscopy (SR-EELS) studies of compositional and chemical profiles of O and N atoms across IGFs.

Publication status:: Published

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APA Style

Nguyen-Manh, D., Cockayne, D., Doeblinger, M., Marsh, C., Sutton, A., & van Duin, A. (2004). Structural modelling of nano-amorphous Si-O-N films in silicon nitride ceramics. Institute-of-Physics-Electron-Microscopy and Analysis-Group Conference (EMAG 2003), 179, 139–142.

MLA Style

Nguyen-Manh, D, et al. “Structural Modelling of Nano-Amorphous Si-O-N Films in Silicon Nitride Ceramics.” Institute-of-Physics-Electron-Microscopy and Analysis-Group Conference (EMAG 2003), no. 179, 2004, pp. 139–42.

Chicago Style

Nguyen-Manh, D, D Cockayne, M Doeblinger, C Marsh, A Sutton, and A van Duin. 2004. “Structural Modelling of Nano-Amorphous Si-O-N Films in Silicon Nitride Ceramics.” In Institute-of-Physics-Electron-Microscopy and Analysis-Group Conference (EMAG 2003), 139–42.
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Authors

+ Nguyen-Manh, D More by this author

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+ Cockayne, D More by this author

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+ Doeblinger, M More by this author

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+ Marsh, C More by this author

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+ Sutton, A More by this author

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Journal:: ELECTRON MICROSCOPY AND ANALYSIS 2003 More from this journal
Issue:: 179
Pages:: 139-142
Publication date:: 2004-01-01
Event title:: Institute-of-Physics-Electron-Microscopy and Analysis-Group Conference (EMAG 2003)
ISSN:: 0951-3248
ISBN:: 0750309679

Pubs id:: pubs:27961
UUID:: uuid:f18a825c-0444-4d3d-9161-150e0aa762e3
Local pid:: pubs:27961
Source identifiers:: 27961
Deposit date:: 2012-12-19
ARK identifier:: ark:/29072/ora_f18a825c04444d3d9161150e0aa762e3

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Copyright date:: 2004

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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