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On the importance of fifth-order spherical aberration for a fully corrected electron microscope.

Abstract:

Next generation aberration correctors will not only eliminate the third-order spherical aberration, but also improve the information limit by correction of chromatic aberration. As a result of these improvements, higher order aberrations, which have largely been neglected in image analysis, will become important. In this paper, we concern ourselves with situations where sub-A resolution can be achieved, and where the third-order spherical aberration is corrected and the fifth-order spherical ...

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Publication status:
Published

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Journal:
Ultramicroscopy
Volume:
106
Issue:
4-5
Pages:
301-306
Publication date:
2006-03-01
DOI:
EISSN:
1879-2723
ISSN:
0304-3991
Source identifiers:
1936
Language:
English
Keywords:
Pubs id:
pubs:1936
UUID:
uuid:ee919433-17f2-42e4-a573-64a6447b9733
Local pid:
pubs:1936
Deposit date:
2012-12-19

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