On the importance of fifth-order spherical aberration for a fully corrected electron microscope.

Journal article

Next generation aberration correctors will not only eliminate the third-order spherical aberration, but also improve the information limit by correction of chromatic aberration. As a result of these improvements, higher order aberrations, which have largely been neglected in image analysis, will become important. In this paper, we concern ourselves with situations where sub-A resolution can be achieved, and where the third-order spherical aberration is corrected and the fifth-order spherical aberration is measurable. We derive formulae to explore the maximum value of the fifth-order spherical aberration for directly interpretable imaging and discuss the optimum imaging conditions and their applicable range.

Authors: Chang, L; Kirkland, A; Titchmarsh, J

• Publication status: Published
• Journal: Ultramicroscopy
• Volume: 106
• Issue: 4-5
• Pages: 301-306
• Publication date: 2006-03-01
• DOI: 10.1016/j.ultramic.2005.09.004
• EISSN: 1879-2723
• ISSN: 0304-3991
• Language: English
• Keywords: C-s and C-c-corrected microscope; phase contrast theory