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APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS

Abstract:

The Nuclear Microprobe at the University of Oxford has been employed to produce images of crystal defects using transmission ion channeling This paper describes the experimental set-up for the technique and shows how images of stacking faults near the surface of a 40 mu m thick silicon crystal can be generated, The invisibility of faults for certain planar channeling directions produces information on the nature of these defects. For the faults that are visible, the choice of channeling direc...

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Publication status:
Published

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Authors


WILSHAW, P More by this author
Volume:
104
Issue:
1-4
Pages:
233-237
Publication date:
1995-09-05
DOI:
ISSN:
0168-583X
URN:
uuid:e9143e1f-c943-4bba-bb7d-b76ab44a24ea
Source identifiers:
21337
Local pid:
pubs:21337
Keywords:

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