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ON THE FORMATION OF TRENCH-INDUCED DISLOCATIONS IN DYNAMIC RANDOM-ACCESS MEMORIES (DRAMS)

Publication status:
Published

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Journal:
MICROSCOPY OF SEMICONDUCTING MATERIALS 1993 More from this journal
Issue:
134
Pages:
235-238
Publication date:
1993-01-01
Event title:
8th Royal-Microscopical-Society Conference: Microscopy of Semiconducting Materials 1993 (MSM VIII)
ISSN:
0951-3248
ISBN:
0750302909


Keywords:
Pubs id:
pubs:6239
UUID:
uuid:e60f416c-859d-4d08-93d7-3f8555be1a73
Local pid:
pubs:6239
Source identifiers:
6239
Deposit date:
2012-12-19

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