Journal article
MBE growth of (110) refractory metals on a-plane sapphire
- Abstract:
- Molecular growth epitaxy (MBE) growth of (110) refractory metals on a-plane sapphire was discussed. Reflection high-energy electron diffraction (RHEED) and X-ray diffraction (XRD) techniques were used. Results showed that both Nb and Ta grow in an approximate layer-by-layer mode and growth in Mo is attributed to greater mismatch with sapphire.
- Publication status:
- Published
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- Publisher copy:
- 10.1023/A:1024585400149
Authors
- Journal:
- JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS More from this journal
- Volume:
- 14
- Issue:
- 9
- Pages:
- 533-539
- Publication date:
- 2003-09-01
- DOI:
- ISSN:
-
0957-4522
- Language:
-
English
- Pubs id:
-
pubs:21983
- UUID:
-
uuid:e519c2d5-49af-4b95-b2da-42d872f1f03a
- Local pid:
-
pubs:21983
- Source identifiers:
-
21983
- Deposit date:
-
2012-12-19
- ARK identifier:
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- Copyright date:
- 2003
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