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Materials analysis by aberration-corrected STEM

Abstract:

Electron-optical aberration correction has recently progressed from a promising concept to a powerful research tool. 100-120 kV scanning transmission electron microscopes (STEMs) equipped with spherical aberration (C-s) correctors now achieve sub-A resolution in high-angle annular dark field (HAADF) imaging, and a 300 kV C-s-corrected STEM has reached 0.6 A HAADF resolution. Moreover, the current available in an atom-sized probe has grown by about 10x, allowing electron energy loss spectrosco...

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Publication status:
Published

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Authors


Krivanek, OL More by this author
Corbin, GC More by this author
McManama-Smith, A More by this author
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Volume:
839
Pages:
9-14
Publication date:
2005
ISSN:
0272-9172
URN:
uuid:de369784-a03d-4e3e-b56c-27429ca87aa4
Source identifiers:
16313
Local pid:
pubs:16313
ISBN:
1-55899-787-3

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