Journal article icon

Journal article

Thermal and ion-beam-induced etching of InP with chlorine

Abstract:
Surface spectroscopic techniques have been used to investigate adsorption and thermal and ion-induced processes at the InP(100)-Cl2 interface. Two adsorption states are identified and etching reactions are interpreted in terms of surface chemical transformations and desorption processes involving these states.

Actions


Access Document


Publisher copy:
10.1088/0953-8984/1/SB/031

Authors


More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Physical & Theoretical Chem
Role:
Author


Journal:
Journal of Physics: Condensed Matter More from this journal
Volume:
1
Issue:
SB
Pages:
SB179-SB180
Publication date:
1989-01-01
DOI:
EISSN:
1361-648X
ISSN:
0953-8984


Language:
English
Pubs id:
pubs:94398
UUID:
uuid:d5c28039-4ce3-4ffc-a586-2c188e10a678
Local pid:
pubs:94398
Source identifiers:
94398
Deposit date:
2012-12-20

Terms of use



Views and Downloads






If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP