Journal article
Thermal and ion-beam-induced etching of InP with chlorine
- Abstract:
- Surface spectroscopic techniques have been used to investigate adsorption and thermal and ion-induced processes at the InP(100)-Cl2 interface. Two adsorption states are identified and etching reactions are interpreted in terms of surface chemical transformations and desorption processes involving these states.
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Authors
- Journal:
- Journal of Physics: Condensed Matter More from this journal
- Volume:
- 1
- Issue:
- SB
- Pages:
- SB179-SB180
- Publication date:
- 1989-01-01
- DOI:
- EISSN:
-
1361-648X
- ISSN:
-
0953-8984
- Language:
-
English
- Pubs id:
-
pubs:94398
- UUID:
-
uuid:d5c28039-4ce3-4ffc-a586-2c188e10a678
- Local pid:
-
pubs:94398
- Source identifiers:
-
94398
- Deposit date:
-
2012-12-20
Terms of use
- Copyright date:
- 1989
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