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Contrast in atomically resolved EF-SCEM imaging.

Abstract:

Energy-filtered scanning confocal electron microscopy (EF-SCEM) is a technique that uses the reduced depth of field of an aberration-corrected transmission electron microscope to provide three-dimensional (3D) compositional information. Using a silicon sample in the <110> orientation, we show that EF-SCEM image data can be recorded that shows lattice resolution in the plane perpendicular to the incident beam direction. The confocal effect is demonstrated through the reduction of the mea...

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Publication status:
Published

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Authors


D'Alfonso, AJ More by this author
Hashimoto, A More by this author
Morgan, AJ More by this author
Takeguchi, M More by this author
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Journal:
Ultramicroscopy
Volume:
134
Pages:
185-192
Publication date:
2013-11-05
DOI:
EISSN:
1879-2723
ISSN:
0304-3991
URN:
uuid:bda47e5b-3d45-4b73-b441-20189b5e4346
Source identifiers:
416226
Local pid:
pubs:416226

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