Journal article

SPATIALLY AND TEMPORALLY RESOLVED LASER-INDUCED FLUORESCENCE MEASUREMENTS OF CF2 AND CF RADICALS IN A CF4 RF PLASMA

Abstract:: Laser-induced fluorescence has been used to examine the temporal behavior of ground-state CF2 and CF radicals in a CF4 plasma etching reactor. We also report the measured spatial dependencies of the radical concentrations, and develop a rigorous model for their interpretation. The results indicate that for CF2 and CF, wall removal processes are dominant at low pressures of the order of 50 mTorr, and that CF is not produced by electron impact dissociation of CF2.

Publication status:: Published

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APA Style

Booth, J., Hancock, G., Perry, N., & Toogood, M. (1989). SPATIALLY AND TEMPORALLY RESOLVED LASER-INDUCED FLUORESCENCE MEASUREMENTS OF CF2 AND CF RADICALS IN A CF4 RF PLASMA. JOURNAL OF APPLIED PHYSICS, 66(11), 5251–5257.

MLA Style

Booth, J, et al. “SPATIALLY AND TEMPORALLY RESOLVED LASER-INDUCED FLUORESCENCE MEASUREMENTS OF CF2 AND CF RADICALS IN A CF4 RF PLASMA.” JOURNAL OF APPLIED PHYSICS, vol. 66, no. 11, 1989, pp. 5251–57.

Chicago Style

Booth, J, G Hancock, N Perry, and M Toogood. 1989. “SPATIALLY AND TEMPORALLY RESOLVED LASER-INDUCED FLUORESCENCE MEASUREMENTS OF CF2 AND CF RADICALS IN A CF4 RF PLASMA.” JOURNAL OF APPLIED PHYSICS 66 (11): 5251–57.
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Publisher copy:: 10.1063/1.343712

Authors

+ Booth, J More by this author

Role:: Author

+ Hancock, G More by this author

Institution:: University of Oxford
Division:: MPLS
Department:: Chemistry
Sub department:: Physical & Theoretical Chem
Role:: Author

+ Perry, N More by this author

Role:: Author

+ Toogood, M More by this author

Role:: Author

Journal:: JOURNAL OF APPLIED PHYSICS More from this journal
Volume:: 66
Issue:: 11
Pages:: 5251-5257
Publication date:: 1989-12-01
DOI:: 10.1063/1.343712
ISSN:: 0021-8979

Language:: English
Pubs id:: pubs:43136
UUID:: uuid:b1bdf7de-3ab6-4a0c-8ae3-a4a7018fd1ad
Local pid:: pubs:43136
Source identifiers:: 43136
Deposit date:: 2012-12-19
ARK identifier:: ark:/29072/ora_b1bdf7de3ab64a0c8ae3a4a7018fd1ad

Terms of use

Copyright date:: 1989

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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