Narrowband multispectral filter set for visible band.

Journal article

We design, fabricate and characterise a narrowband Fabry-Pérot multispectral filter set for the visible range (400-750 nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering the effective optical length instead. Using electron-beam lithography, a sub-wavelength hole array is patterned in a silicon nitride cavity layer, backfilled with poly(methyl methacrylate), and bounded by aluminium mirrors to create 23 filters with full-width half-maximums of 22-46 nm. Additionally, for colourmetric reproduction applications, using as few as 10 filters gives a colour difference (CIEDE2000) of 0.072, better than trichromatic filters.

Authors: Walls, K; Chen, Q; Grant, J; Collins, S; Cumming, DR

• Publication status: Published
• Journal: Optics express
• Volume: 20
• Issue: 20
• Pages: 21917-21923
• Publication date: 2012-09-01
• DOI: 10.1364/oe.20.021917
• EISSN: 1094-4087
• ISSN: 1094-4087
• Language: English
• Keywords: Equipment Failure Analysis; Optical Devices; Computer-Aided Design; Equipment Design; Filtration; Interferometry; Colorimetry