Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array

Journal article

Abstract:: Monitoring the collective behaviour of coupled micro/nano resonators array provides a distinct opportunity for high resolution multi-function sensing. We report an inverse eigenvalue analysis based sensing approach for large array of coupled micro/nano resonators. A new characterization algorithm is proposed to precisely extract the system matrix of those multiplexed sensors with reduced algorithmic complexity and below 1% relative error. The method has been verified experimentally using five corner coupled square plate MEMS resonators with a natural frequency close to 0.85 MHz. The method is also capable of characterizing the fabrication process and important sensor parameters such as the spring constant and coupling ratio.

Files:: 10.1007%2Fs10470-018-1160-2.pdf

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Publisher:: Springer Verlag
Journal:: Analog Integrated Circuits and Signal Processing More from this journal
Volume:: 95
Issue:: 3
Pages:: 447–455
Publication date:: 2018-03-13
Acceptance date:: 2018-03-06
DOI:: 10.1007/s10470-018-1160-2
EISSN:: 1573-1979
ISSN:: 0925-1030

Notes:: This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

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