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Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array

Abstract:

Monitoring the collective behaviour of coupled micro/nano resonators array provides a distinct opportunity for high resolution multi-function sensing. We report an inverse eigenvalue analysis based sensing approach for large array of coupled micro/nano resonators. A new characterization algorithm is proposed to precisely extract the system matrix of those multiplexed sensors with reduced algorithmic complexity and below 1% relative error. The method has been verified experimentally using five...

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Publication status:
Published
Peer review status:
Peer reviewed
Version:
Publisher's version

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Publisher copy:
10.1007/s10470-018-1160-2

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More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Engineering Science
Oxford college:
Pembroke College
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Engineering Science
Role:
Author
Publisher:
Springer Verlag Publisher's website
Journal:
Analog Integrated Circuits and Signal Processing Journal website
Volume:
95
Issue:
3
Pages:
447–455
Publication date:
2018-03-13
Acceptance date:
2018-03-06
DOI:
EISSN:
1573-1979
ISSN:
0925-1030
Pubs id:
pubs:832423
URN:
uri:ab80f8aa-0e5f-4f2d-86db-db9f5ae6d524
UUID:
uuid:ab80f8aa-0e5f-4f2d-86db-db9f5ae6d524
Local pid:
pubs:832423
Keywords:

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