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Adaptive optics for direct writing in three-dimensional nano-fabrication

Abstract:
Aberrations affect the focal spot quality in direct laser write applications when focusing through a refractive index mismatch. We develop adaptive optics to correct aberrations and demonstrate improved fabrication depth in several substrates. (C) 2009 Optical Society of America

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Institution:
University of Oxford
Department:
Oxford, MPLS, Engineering Science
Role:
Author
Publisher:
IEEE
Publication date:
2010-01-01
URN:
uuid:ab6134c2-e683-4ff8-86f6-586d883aa856
Source identifiers:
127278
Local pid:
pubs:127278
ISBN:
978-1-55752-890-2

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