- Abstract:
- Aberrations affect the focal spot quality in direct laser write applications when focusing through a refractive index mismatch. We develop adaptive optics to correct aberrations and demonstrate improved fabrication depth in several substrates. (C) 2009 Optical Society of America
- Publisher:
- IEEE
- Publication date:
- 2010-01-01
- URN:
-
uuid:ab6134c2-e683-4ff8-86f6-586d883aa856
- Source identifiers:
-
127278
- Local pid:
- pubs:127278
- ISBN:
- 978-1-55752-890-2
- Copyright date:
- 2010
Conference
Adaptive optics for direct writing in three-dimensional nano-fabrication
Actions
Authors
Bibliographic Details
Terms of use
If you are the owner of this record, you can report an update to it here: Report update to this record