Conference item
Adaptive optics for direct writing in three-dimensional nano-fabrication
- Abstract:
- Aberrations affect the focal spot quality in direct laser write applications when focusing through a refractive index mismatch. We develop adaptive optics to correct aberrations and demonstrate improved fabrication depth in several substrates. (C) 2009 Optical Society of America
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Bibliographic Details
- Publisher:
- IEEE
- Publication date:
- 2010-01-01
- Source identifiers:
-
127278
- ISBN:
- 9781557528902
Item Description
- Pubs id:
-
pubs:127278
- UUID:
-
uuid:ab6134c2-e683-4ff8-86f6-586d883aa856
- Local pid:
- pubs:127278
- Deposit date:
- 2013-11-17
Terms of use
- Copyright date:
- 2010
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