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LASER CHEMICAL VAPOR-DEPOSITION OF PATTERNED FE ON SILICA GLASS - OBSERVATION AND ORIGINS OF PERIODIC RIPPLE STRUCTURES

Abstract:

Laser chemical vapor deposition of patterned iron deposits on silica glass has been carried out using an Ar ion laser-driven dissociation of iron pentacarbonyl vapor. The structure of the deposited films has been studied using optical, electron, and scanning Auger microscopic techniques. Extensive iron silicate formation is observed at the iron-glass interface and 50-μm periodic ripples are formed in the delineated deposits. The origin of the periodic structure is discussed with reference to ...

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Publication status:
Published

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Publisher copy:
10.1063/1.336385

Authors


JACKMAN, R More by this author
Journal:
JOURNAL OF APPLIED PHYSICS
Volume:
59
Issue:
6
Pages:
2031-2034
Publication date:
1986-03-15
DOI:
ISSN:
0021-8979
URN:
uuid:a83fcf25-4d39-458a-840f-28411d35bf15
Source identifiers:
42590
Local pid:
pubs:42590
Language:
English

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