Journal article icon

Journal article

LASER CHEMICAL VAPOR-DEPOSITION OF PATTERNED FE ON SILICA GLASS - OBSERVATION AND ORIGINS OF PERIODIC RIPPLE STRUCTURES

Abstract:

Laser chemical vapor deposition of patterned iron deposits on silica glass has been carried out using an Ar ion laser-driven dissociation of iron pentacarbonyl vapor. The structure of the deposited films has been studied using optical, electron, and scanning Auger microscopic techniques. Extensive iron silicate formation is observed at the iron-glass interface and 50-μm periodic ripples are formed in the delineated deposits. The origin of the periodic structure is discussed with reference to ...

Expand abstract
Publication status:
Published

Actions


Access Document


Publisher copy:
10.1063/1.336385

Authors


Journal:
JOURNAL OF APPLIED PHYSICS
Volume:
59
Issue:
6
Pages:
2031-2034
Publication date:
1986-03-15
DOI:
ISSN:
0021-8979
Source identifiers:
42590
Language:
English
Pubs id:
pubs:42590
UUID:
uuid:a83fcf25-4d39-458a-840f-28411d35bf15
Local pid:
pubs:42590
Deposit date:
2012-12-19

Terms of use


Views and Downloads






If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP