Journal article icon

Journal article

Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity

Abstract:

We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMS resonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over thre...

Expand abstract
Publication status:
Published

Actions


Access Document


Publisher copy:
10.1063/1.3315877

Authors


Thiruvenkatanathan, P More by this author
Woodhouse, J More by this author
Seshia, AA More by this author
Journal:
APPLIED PHYSICS LETTERS
Volume:
96
Issue:
8
Pages:
081913-081913
Publication date:
2010-02-22
DOI:
ISSN:
0003-6951
URN:
uuid:9fcd11af-06c2-402b-a716-b9feca83659a
Source identifiers:
166279
Local pid:
pubs:166279

Terms of use


Metrics



If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP