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Local measurement and computational refinement of aberrations for HRTEM.

Abstract:
Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.
Publication status:
Published

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Publisher copy:
10.1017/S1431927606060612

Authors


Journal:
Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada More from this journal
Volume:
12
Issue:
6
Pages:
461-468
Publication date:
2006-12-01
Event title:
10th Meeting on Frontiers of Electron Microscopy in Materials Science
DOI:
EISSN:
1435-8115
ISSN:
1431-9276


Keywords:
Pubs id:
pubs:27448
UUID:
uuid:9950c034-58db-4aec-83e6-643387142828
Local pid:
pubs:27448
Source identifiers:
27448
Deposit date:
2012-12-19
ARK identifier:

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