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Journal article

ONE-DIMENSIONAL AND TWO-DIMENSIONAL NONLINEAR DOPANT DIFFUSION IN CRYSTALLINE SILICON - SOME ANALYTICAL RESULTS

Publication status:
Published

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Publisher copy:
10.1016/0038-1101(88)90146-3

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Journal:
SOLID-STATE ELECTRONICS More from this journal
Volume:
31
Issue:
2
Pages:
299-305
Publication date:
1988-02-01
DOI:
ISSN:
0038-1101


Pubs id:
pubs:357679
UUID:
uuid:991dbd86-fd5b-4ca5-88ce-8cf4785004a0
Local pid:
pubs:357679
Source identifiers:
357679
Deposit date:
2013-11-16

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