Smart and quantitative near-infrared point-diffraction interferometer based on the self-referencing wavefront sensor

Journal article

This paper describes the development of a novel infrared point-diffraction interferometer (IPDI), which can be readily applied to real-time quantitative phase measurement. We generate reference wave with the help of Michelson-like unit combined with a low-pass spatial filter, and extract the phase information using windowed Fourier transform algorithm from single off-axis fringes. The arrangement of the proposed setup offers a quasi-common-path geometry, which could significantly minimize the systematic errors. The proposed method of IPDI is effective and sufficient for the dynamic process measurement of small deformation with higher spatial resolution compared with the conventional off-axis scheme. The feasibility of the proposed setup is demonstrated, followed by methods of reconstruction and system calibration. The nanoscale repeatability is achieved in our experiment.

Authors: Yang, P; Hippler, S; Deen, C; Brandner, W; Kendrew, S

• Journal: Zhongguo Jiguang/Chinese Journal of Lasers
• Volume: 40
• Issue: 5
• Pages: 0508001-0508001
• Publication date: 2013-05-01
• DOI: 10.3788/CJL201340.0508001
• ISSN: 0258-7025
• Language: English
• Keywords: Measurement; Windowed Fourier transform; Beam splitter; Off-axis; Point-diffraction interferometer