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Towards sub-0.5 A electron beams.

Abstract:

In the 4 years since the previous meeting in the SALSA series, aberration correction has progressed from a promising concept to a powerful research tool. We summarize the factors that have enabled 100-120kV scanning transmission electron microscopes to achieve sub-A resolution, and to increase the current available in an atom-sized probe by a factor of 10 and more. Once C(s) is corrected, fifth-order spherical aberration (C(5)) and chromatic aberration (C(c)) pose new limits on resolution. We...

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Publication status:
Published

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Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Role:
Author
Volume:
96
Issue:
3-4
Pages:
229-237
Publication date:
2003-09-05
DOI:
EISSN:
1879-2723
ISSN:
0304-3991
URN:
uuid:86751f10-8bbc-4ded-bddb-7a55c4a8344d
Source identifiers:
18317
Local pid:
pubs:18317

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