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Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

Publication status:: Published

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APA Style

Song, X., Yeap, K., Zhu, J., Belnoue, J., Sebastiani, M., Bemporad, E., Zeng, K., & Korsunsky, A. (2012). Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging. THIN SOLID FILMS, 520(6), 2073–2076.

MLA Style

Song, X., et al. “Residual Stress Measurement in Thin Films at Sub-Micron Scale Using Focused Ion Beam Milling and Imaging.” THIN SOLID FILMS, vol. 520, no. 6, 2012, pp. 2073–76.

Chicago Style

Song, X, K Yeap, J Zhu, J Belnoue, M Sebastiani, E Bemporad, K Zeng, and A Korsunsky. 2012. “Residual Stress Measurement in Thin Films at Sub-Micron Scale Using Focused Ion Beam Milling and Imaging.” THIN SOLID FILMS 520 (6): 2073–76.
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Publisher copy:: 10.1016/j.tsf.2011.10.211

Authors

+ Song, X More by this author

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+ Yeap, K More by this author

Role:: Author

+ Zhu, J More by this author

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+ Belnoue, J More by this author

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+ Sebastiani, M More by this author

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Journal:: THIN SOLID FILMS More from this journal
Volume:: 520
Issue:: 6
Pages:: 2073-2076
Publication date:: 2012-01-01
DOI:: 10.1016/j.tsf.2011.10.211
ISSN:: 0040-6090

Keywords:: Digital image correlation

Residual stress

Focused Ion Beam

Strain relief function
Pubs id:: pubs:306733
UUID:: uuid:83cb25e3-7fd8-47b7-8fe8-3b641caaa6c5
Local pid:: pubs:306733
Source identifiers:: 306733
Deposit date:: 2013-11-17

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Copyright date:: 2012

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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