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Journal article

Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

Publication status:
Published

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Publisher copy:
10.1016/j.tsf.2011.10.211

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Journal:
THIN SOLID FILMS
Volume:
520
Issue:
6
Pages:
2073-2076
Publication date:
2012-01-01
DOI:
ISSN:
0040-6090
URN:
uuid:83cb25e3-7fd8-47b7-8fe8-3b641caaa6c5
Source identifiers:
306733
Local pid:
pubs:306733

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