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Electron diffraction based techniques in scanning electron microscopy of bulk materials

Abstract:

The three scanning electron microscope diffraction based techniques of electron channelling patterns (ECPs), electron channelling contrast imaging (ECCI), and electron backscatter diffraction (EBSD) are reviewed. The dynamical diffraction theory is used to describe the physics of electron channelling, and hence the contrast observed in ECPs (and EBSD) and ECCI images of dislocations. Models for calculating channelling contrast are described and their limitations discussed. The practicalities ...

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Publication status:
Published

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Authors


Wilkinson, AJ More by this author
Hirsch, PB More by this author
Journal:
MICRON
Volume:
28
Issue:
4
Pages:
279-308
Publication date:
1997-08-05
DOI:
ISSN:
0968-4328
URN:
uuid:7945f677-8df9-4f45-b8bb-e56d920edf8a
Source identifiers:
6886
Local pid:
pubs:6886

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