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Focused ion beam ring drilling for residual stress evaluation

Abstract:

Focused Ion Beam (FIB) milling of ring-shaped trenches (ring drilling) induces controlled gradual strain relief at the surface of residually stressed samples, with the central "island" approaching the unstressed state. Strain change was measured at sample surface via Digital Image Correlation analysis of SEM micrographs of a regular pattern of dots deposited on the sample surface prior to ring drilling. FE modeling of strain evolution with ring drilling depth agrees with experimental observat...

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Publication status:
Published

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Institution:
University of Oxford
Department:
Oxford, MPLS, Engineering Science
Sebastiani, M More by this author
Bemporad, E More by this author
Journal:
MATERIALS LETTERS
Volume:
63
Issue:
22
Pages:
1961-1963
Publication date:
2009-09-15
DOI:
ISSN:
0167-577X
URN:
uuid:78642fa2-5896-496f-acc8-3760039c7761
Source identifiers:
63715
Local pid:
pubs:63715

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