Conference item
ELECTRON-BEAM-INDUCED ACTIVITY OF DEFECTS IN SILICON
- Publication status:
- Published
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- Publisher copy:
- 10.1016/0921-5107(94)90289-5
Authors
- Journal:
- MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY More from this journal
- Volume:
- 24
- Issue:
- 1-3
- Pages:
- 8-14
- Publication date:
- 1994-05-01
- Event title:
- 3rd International Workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 93) - A NATO Advanced Research Workshop
- DOI:
- ISSN:
-
0921-5107
- Keywords:
- Pubs id:
-
pubs:30312
- UUID:
-
uuid:785691ad-b093-4527-97af-61958d8637e4
- Local pid:
-
pubs:30312
- Source identifiers:
-
30312
- Deposit date:
-
2012-12-19
- ARK identifier:
Terms of use
- Copyright date:
- 1994
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