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ELECTRON-BEAM-INDUCED ACTIVITY OF DEFECTS IN SILICON

Publication status:
Published

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Publisher copy:
10.1016/0921-5107(94)90289-5

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Journal:
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY More from this journal
Volume:
24
Issue:
1-3
Pages:
8-14
Publication date:
1994-05-01
Event title:
3rd International Workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 93) - A NATO Advanced Research Workshop
DOI:
ISSN:
0921-5107


Keywords:
Pubs id:
pubs:30312
UUID:
uuid:785691ad-b093-4527-97af-61958d8637e4
Local pid:
pubs:30312
Source identifiers:
30312
Deposit date:
2012-12-19
ARK identifier:

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