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Thermal oxidation and encapsulation of silicon-carbon nanolayers

Abstract:

Silicon-carbon (Si-C) thin films play a key role in many technological applications such as hard coatings, high-power electronics, and photovoltaics. In photovoltaics in particular annealed Si-C thin films containing Si quantum dots are used to develop solar cells with improved efficiency. The oxidation of these films during the annealing step, which is unavoidable in the high-throughput processes required for photovoltaics, was explored using scanning electron microscopy, Fourier-transformed...

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Publication status:
Published

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Publisher copy:
10.1016/j.tsf.2012.12.005

Authors


Schnabel, M More by this author
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Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Journal:
THIN SOLID FILMS
Volume:
527
Pages:
193-199
Publication date:
2013
DOI:
ISSN:
0040-6090
URN:
uuid:763c56ad-ed63-4a34-b8c4-eaa2701ddc7e
Source identifiers:
389759
Local pid:
pubs:389759

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