Conference icon

Conference

Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition

Abstract:

Studies of the chemical vapour deposition of diamond films at growth rates > 100 μm h-1 with a 10-kW DC-arc jet system are described. Additions of small amounts of N2 to the standard CH4/H2/Ar feedstock gas results in strong CN(B → X) emission, and quenches C2(d → a) and Hα emissions from the plasma. Species selective, spatially resolved optical emission measurements have enabled derivation of the longitudinal and lateral variation of emitting C2, CN radicals and H (n = 3) atoms within the...

Expand abstract
Publication status:
Published

Actions


Access Document


Authors


Rosser, KN More by this author
More by this author
Institution:
University of Oxford
Department:
Oxford, MPLS, Chemistry, Physical and Theoretical Chem
Expand authors...
Volume:
10
Issue:
3-7
Pages:
370-375
Publication date:
2001
DOI:
ISSN:
0925-9635
URN:
uuid:6f492d5a-2981-409f-9a5e-75a0417dd2a3
Source identifiers:
59797
Local pid:
pubs:59797

Terms of use


Metrics



If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP