Conference item
Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition
- Abstract:
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Studies of the chemical vapour deposition of diamond films at growth rates > 100 μm h-1 with a 10-kW DC-arc jet system are described. Additions of small amounts of N2 to the standard CH4/H2/Ar feedstock gas results in strong CN(B → X) emission, and quenches C2(d → a) and Hα emissions from the plasma. Species selective, spatially resolved optical emission measurements have enabled derivation of the longitudinal and lateral variation of emitting C2, CN radicals and H (n = 3) atoms within the...
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- Publication status:
- Published
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- Publisher copy:
- 10.1016/S0925-9635(00)00444-1
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Bibliographic Details
- Volume:
- 10
- Issue:
- 3-7
- Pages:
- 370-375
- Host title:
- DIAMOND AND RELATED MATERIALS
- Publication date:
- 2001-01-01
- DOI:
- ISSN:
-
0925-9635
- Source identifiers:
-
59797
Item Description
- Keywords:
- Pubs id:
-
pubs:59797
- UUID:
-
uuid:6f492d5a-2981-409f-9a5e-75a0417dd2a3
- Local pid:
- pubs:59797
- Deposit date:
- 2012-12-19
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- Copyright date:
- 2001
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