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Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition

Abstract:

Studies of the chemical vapour deposition of diamond films at growth rates > 100 μm h-1 with a 10-kW DC-arc jet system are described. Additions of small amounts of N2 to the standard CH4/H2/Ar feedstock gas results in strong CN(B → X) emission, and quenches C2(d → a) and Hα emissions from the plasma. Species selective, spatially resolved optical emission measurements have enabled derivation of the longitudinal and lateral variation of emitting C2, CN radicals and H (n = 3) atoms within the...

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Publication status:
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Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Physical & Theoretical Chem
Role:
Author
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Volume:
10
Issue:
3-7
Pages:
370-375
Host title:
DIAMOND AND RELATED MATERIALS
Publication date:
2001-01-01
DOI:
ISSN:
0925-9635
Source identifiers:
59797
Keywords:
Pubs id:
pubs:59797
UUID:
uuid:6f492d5a-2981-409f-9a5e-75a0417dd2a3
Local pid:
pubs:59797
Deposit date:
2012-12-19

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