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Classical-trajectory calculations on Ar+ sputtering of a Si(001) surface using an ab initio potential.

Abstract:

We describe classical-trajectory calculations of sputtering yields for Ar+-ion collisions with a Si(001) surface. The Ar+-Si and short-ranged Si-Si interaction potentials were calculated using the ab initio Hartree-Fock and configuration-interaction methods. The low-energy potential describing the silicon solid is the two- and three-body form due to Stillinger and Weber. We compare the calculated sputtering yields with experiment. The potential-energy surface strongly influences the calculate...

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Publication status:
Published

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Publisher copy:
10.1103/physrevb.39.7680

Authors


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Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Physical & Theoretical Chem
Role:
Author
Journal:
Physical review. B, Condensed matter More from this journal
Volume:
39
Issue:
11
Pages:
7680-7696
Publication date:
1989-04-01
DOI:
ISSN:
0163-1829
Language:
English
Pubs id:
pubs:52876
UUID:
uuid:6d8f25c1-2ab2-4c66-989e-cb937934cc44
Local pid:
pubs:52876
Source identifiers:
52876
Deposit date:
2013-11-17

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