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The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption

Abstract:
The absolute number density of oxygen atoms in the O(3P 2) state is determined in an inductively coupled plasma chamber using absorption spectroscopy enhanced by a high finesse cavity with a continuous wave diode laser as the radiation source. At a nominal pressure of 100 mTorr of precursor gas O2 and 500 W plasma power the O(3P 2) concentration is found to be (4.8 0.6) × 1014 cm-3. © 2007 IOP Publishing Ltd.
Publication status:
Published

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Publisher copy:
10.1088/0022-3727/40/15/022

Authors


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Institution:
University of Oxford
Department:
Oxford, MPLS, Chemistry, Physical and Theoretical Chem
More by this author
Institution:
University of Oxford
Department:
Oxford, MPLS, Chemistry, Physical and Theoretical Chem
More by this author
Institution:
University of Oxford
Department:
Oxford, MPLS, Chemistry, Physical and Theoretical Chem
Thornton, LJ More by this author
Journal:
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume:
40
Issue:
15
Pages:
4515-4518
Publication date:
2007-08-07
DOI:
EISSN:
1361-6463
ISSN:
0022-3727
URN:
uuid:547d18ed-7fd1-477a-8f83-562af3ad67b4
Source identifiers:
40418
Local pid:
pubs:40418
Language:
English

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