Journal article

The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption

Abstract:: The absolute number density of oxygen atoms in the O(3P 2) state is determined in an inductively coupled plasma chamber using absorption spectroscopy enhanced by a high finesse cavity with a continuous wave diode laser as the radiation source. At a nominal pressure of 100 mTorr of precursor gas O2 and 500 W plasma power the O(3P 2) concentration is found to be (4.8 0.6) × 1014 cm-3. © 2007 IOP Publishing Ltd.

Publication status:: Published

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APA Style

Hancock, G., Peverall, R., Ritchie, G., & Thornton, L. (2007). The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 40(15), 4515–4518.

MLA Style

Hancock, G., et al. “The Number Density of Ground State Atomic Oxygen (O(P-3(2))) Measured in an Inductively Coupled Plasma Chamber by Cavity Enhanced Absorption.” JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol. 40, no. 15, 2007, pp. 4515–18.

Chicago Style

Hancock, G, R Peverall, G Ritchie, and L Thornton. 2007. “The Number Density of Ground State Atomic Oxygen (O(P-3(2))) Measured in an Inductively Coupled Plasma Chamber by Cavity Enhanced Absorption.” JOURNAL OF PHYSICS D-APPLIED PHYSICS 40 (15): 4515–18.
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Publisher copy:: 10.1088/0022-3727/40/15/022

Authors

+ Hancock, G More by this author

Institution:: University of Oxford
Division:: MPLS
Department:: Chemistry
Sub department:: Physical & Theoretical Chem
Role:: Author

+ Peverall, R More by this author

Institution:: University of Oxford
Division:: MPLS
Department:: Chemistry
Sub department:: Physical & Theoretical Chem
Role:: Author

+ Ritchie, G More by this author

Institution:: University of Oxford
Division:: MPLS
Department:: Chemistry
Sub department:: Physical & Theoretical Chem
Role:: Author

+ Thornton, L More by this author

Role:: Author

Journal:: JOURNAL OF PHYSICS D-APPLIED PHYSICS More from this journal
Volume:: 40
Issue:: 15
Pages:: 4515-4518
Publication date:: 2007-08-07
DOI:: 10.1088/0022-3727/40/15/022
EISSN:: 1361-6463
ISSN:: 0022-3727

Language:: English
Pubs id:: pubs:40418
UUID:: uuid:547d18ed-7fd1-477a-8f83-562af3ad67b4
Local pid:: pubs:40418
Source identifiers:: 40418
Deposit date:: 2012-12-19

Terms of use

Copyright date:: 2007

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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