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Field emission from pyramidal cathodes covered in porous silicon

Abstract:

Square‐based pyramidal emitters formed by wet etching of p‐type silicon wafers have been anodized to give a thin surface layer of porous silicon. At the surface of such material are very small fibrils with widths ≤3 nm. Field emission measurements from pyramidal cathodes of plain and anodized silicon show a dramatic improvement, when the porous silicon is present. In this case, average peak emission currents of 25 μA have been obtained with the highest measured being 90 μA, improved uniformit...

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Publication status:
Published
Peer review status:
Peer reviewed

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Publisher copy:
10.1116/1.587408

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Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Role:
Author
Publisher:
AIP Publishing Publisher's website
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena Journal website
Volume:
12
Issue:
2
Pages:
662-665
Publication date:
1994-01-01
DOI:
ISSN:
1071-1023
URN:
uuid:51d0a00f-7ff5-4188-b1b5-acf026f49ec9
Source identifiers:
502430
Local pid:
pubs:502430
Paper number:
2

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