Journal article

Overview: Recent progress in three-dimensional atom probe instruments and applications

Abstract:: Over the last few years there have been significant developments in the field of three-dimensional atom probe (3DAP) analysis. This article reviews some of the technical compromises that have led to different instrument designs and the recent improvements in performance. An instrument has now been developed, based around a novel reflectron configuration combining both energy compensation and focusing elements, that yields a large field of view and very high mass resolution. The use of laser pulsing in the 3DAP, together with developments in specimen preparation methods using a focused ion-beam instrument, have led to a significant widening in the range of materials science problems that can be addressed with the 3DAP. Recent studies of semiconductor materials and devices are described. © MICROSCOPY SOCIETY OF AMERICA 2007.

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APA Style

Cerezo, A., Lozano-Perez, S., Sha, G., Smith, G., Clifton, P., & Panayi, P. (2007). Overview: Recent progress in three-dimensional atom probe instruments and applications. Microscopy and Microanalysis, 13(6), 408–417.

MLA Style

Cerezo, A., et al. “Overview: Recent Progress in Three-Dimensional Atom Probe Instruments and Applications.” Microscopy and Microanalysis, vol. 13, no. 6, 2007, pp. 408–17.

Chicago Style

Cerezo, A, S Lozano-Perez, G Sha, G Smith, P Clifton, and P Panayi. 2007. “Overview: Recent Progress in Three-Dimensional Atom Probe Instruments and Applications.” Microscopy and Microanalysis 13 (6): 408–17.
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Publisher copy:: 10.1017/S143192760707095X

Authors

+ Cerezo, A More by this author

Role:: Author

+ Lozano-Perez, S More by this author

Institution:: University of Oxford
Division:: MPLS
Department:: Materials
Role:: Author

+ Sha, G More by this author

Role:: Author

+ Smith, G More by this author

Role:: Author

+ Clifton, P More by this author

Role:: Author

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Journal:: Microscopy and Microanalysis More from this journal
Volume:: 13
Issue:: 6
Pages:: 408-417
Publication date:: 2007-12-01
DOI:: 10.1017/S143192760707095X
EISSN:: 1435-8115
ISSN:: 1431-9276

Pubs id:: pubs:178518
UUID:: uuid:5163a903-1807-43d2-b34d-0430f47c0d9a
Local pid:: pubs:178518
Source identifiers:: 178518
Deposit date:: 2012-12-19

Terms of use

Copyright date:: 2007

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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