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In-situ study of acoustomigration by scanning acoustic force microscopy

Abstract:

High-power operation of surface acoustic wave devices may lead to stress induced material transport, so-called acoustomigration. We used Scanning Acoustic Force Microscopy (SAFM) to study acoustomigration of metal structures in-situ, i.e. during the high-power loading of the device. SAFM allows for the simultaneous measurement of the acoustic wavefield and the topography with submicron lateral resolution. We present acoustic wavefield and topographic image sequences giving a clear insight int...

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Publication status:
Published

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Institution:
University of Oxford
Department:
Oxford, MPLS, Physics, Condensed Matter Physics
Role:
Author
Volume:
2
Pages:
1483-1486
Publication date:
2003-01-01
ISSN:
1051-0117
URN:
uuid:4c8d95e7-6ed6-46fd-b105-4241033fe62c
Source identifiers:
151476
Local pid:
pubs:151476
ISBN:
0-7803-7922-5

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