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Comparative study of the influence of the solvent on the catalytic growth of carbon nanotubes

Abstract:

The catalytic growth by chemical vapor deposition is a well-established route to single-wall carbon nanotubes (SWNTs). In this process, the choice and preparation of the metal catalyst determines the nanotube growth. The system Fe/Mo is known to yield a large percentage of SWNTs. In order to make use of SWNTs in electronic or electromechanical devices, the patterned growth relies on lithography techniques like photolithography or electron beam lithography. Many standard lithographic processes...

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Publisher copy:
10.1016/j.mee.2007.04.147
Journal:
Microelectronic Engineering More from this journal
Volume:
85
Issue:
1
Pages:
156-160
Publication date:
2008-01-01
DOI:
ISSN:
0167-9317
Language:
English
Keywords:
Pubs id:
pubs:151531
UUID:
uuid:44aac23c-90a0-4e3f-b7f1-b275e075e47c
Local pid:
pubs:151531
Source identifiers:
151531
Deposit date:
2012-12-19

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