Journal article
Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope.
- Abstract:
- We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function.
- Publication status:
- Published
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- Publisher copy:
- 10.1103/physrevlett.104.200801
Authors
- Journal:
- Physical Review Letters More from this journal
- Volume:
- 104
- Issue:
- 20
- Pages:
- 200801
- Publication date:
- 2010-05-01
- DOI:
- EISSN:
-
1079-7114
- ISSN:
-
0031-9007
- Language:
-
English
- Pubs id:
-
pubs:60513
- UUID:
-
uuid:4437cec0-8e2d-4c30-b2cc-7bea5b8c23e4
- Local pid:
-
pubs:60513
- Source identifiers:
-
60513
- Deposit date:
-
2012-12-19
- ARK identifier:
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- Copyright date:
- 2010
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