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Journal article

Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope.

Abstract:

We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an ener...

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Publication status:
Published

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Journal:
Physical review letters
Volume:
104
Issue:
20
Pages:
200801
Publication date:
2010-05-05
DOI:
EISSN:
1079-7114
ISSN:
0031-9007
URN:
uuid:4437cec0-8e2d-4c30-b2cc-7bea5b8c23e4
Source identifiers:
60513
Local pid:
pubs:60513
Language:
English

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