Journal article

Electron-beam-induced activity of defects in silicon

Abstract:: The results are presented from an investigation using the electron-beam-induced current (EBIC) and deep-level transient spectroscopy techniques which demonstrate that irradiation with a low energy electron beam produces increased electrical activity in p-type silicon specimens containing Fe or Cu. This effect is termed electron-beam-induced activity (EBIA). An analysis of the EBIC technique for studying transition metal impurities is given and the EBIA of Fe-contaminated silicon is shown to be due to recombination-enhanced dissociation of FeB pairs.

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APA Style

Wilshaw, P., Fell, T., Amaku, C., & Coteau, d. (1994). Electron-beam-induced activity of defects in silicon. Materials Science and Engineering. B, Solid-State Materials for Advanced Technology, B24(1-3), 8–14.

MLA Style

Wilshaw, P, et al. “Electron-Beam-Induced Activity of Defects in Silicon.” Materials Science and Engineering. B, Solid-State Materials for Advanced Technology, vol. B24, nos. 1-3, 1994, pp. 8–14.

Chicago Style

Wilshaw, P, T Fell, C Amaku, and d Coteau. 1994. “Electron-Beam-Induced Activity of Defects in Silicon.” Materials Science and Engineering. B, Solid-State Materials for Advanced Technology B24 (1-3): 8–14.
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Authors

+ Wilshaw, P More by this author

Institution:: University of Oxford
Division:: MPLS
Department:: Materials
Role:: Author

+ Fell, T More by this author

Role:: Author

+ Amaku, C More by this author

Role:: Author

+ Coteau, d More by this author

Role:: Author

Publisher:: Elsevier
Journal:: Materials science and engineering. B, Solid-state materials for advanced technology More from this journal
Volume:: B24
Issue:: 1-3
Pages:: 8-14
Publication date:: 1994-05-01
ISSN:: 0921-5107

Language:: English
Pubs id:: pubs:502439
UUID:: uuid:434f9554-735a-4fa9-8ebe-ba46a1198577
Local pid:: pubs:502439
Source identifiers:: 502439
Deposit date:: 2015-01-15
ARK identifier:: ark:/29072/ora_434f9554735a4fa98ebeba46a1198577

Terms of use

Copyright date:: 1994

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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