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Journal article

Diagnostics of active species in plasmas

Abstract:
A brief review is given of non-invasive diagnostics applicable to gas phase species in plasmas. Descriptions are given of spatially resolved measurements of both concentrations and energy distributions of atoms, radicals, ions and electrons, and of determinations of the fields which control their behaviour. Optical diagnostics which can be used in real processing conditions are emphasized, and the limitations of the type of information which can be extracted from these are discussed. © 1995.

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Institution:
University of Oxford
Department:
Oxford, MPLS, Chemistry, Physical and Theoretical Chem
Journal:
Surface and Coatings Technology
Volume:
74-75
Issue:
PART 1
Pages:
10-14
Publication date:
1995-09-05
ISSN:
0257-8972
URN:
uuid:3b67add7-9024-44f2-b1e3-583ccb62860f
Source identifiers:
332009
Local pid:
pubs:332009
Language:
English
Keywords:

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