Journal article

Diagnostics of active species in plasmas

Abstract:: A brief review is given of non-invasive diagnostics applicable to gas phase species in plasmas. Descriptions are given of spatially resolved measurements of both concentrations and energy distributions of atoms, radicals, ions and electrons, and of determinations of the fields which control their behaviour. Optical diagnostics which can be used in real processing conditions are emphasized, and the limitations of the type of information which can be extracted from these are discussed. © 1995.

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APA Style

Hancock, G. (1995). Diagnostics of active species in plasmas. Surface and Coatings Technology, 74-75(PART 1), 10–14.

MLA Style

Hancock, G. “Diagnostics of Active Species in Plasmas.” Surface and Coatings Technology, vols. 74-75, no. PART 1, 1995, pp. 10–14.

Chicago Style

Hancock, G. 1995. “Diagnostics of Active Species in Plasmas.” Surface and Coatings Technology 74-75 (PART 1): 10–14.
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Authors

+ Hancock, G More by this author

Institution:: University of Oxford
Division:: MPLS
Department:: Chemistry
Sub department:: Physical & Theoretical Chem
Role:: Author

Journal:: Surface and Coatings Technology More from this journal
Volume:: 74-75
Issue:: PART 1
Pages:: 10-14
Publication date:: 1995-09-01
ISSN:: 0257-8972

Language:: English
Keywords:: Spectroscopy

Emission

Plasma

Diagnostics

Laser
Pubs id:: pubs:332009
UUID:: uuid:3b67add7-9024-44f2-b1e3-583ccb62860f
Local pid:: pubs:332009
Source identifiers:: 332009
Deposit date:: 2012-12-19
ARK identifier:: ark:/29072/ora_3b67add7902444f2b1e3583ccb62860f

Terms of use

Copyright date:: 1995

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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