Diagnostics of active species in plasmas
- A brief review is given of non-invasive diagnostics applicable to gas phase species in plasmas. Descriptions are given of spatially resolved measurements of both concentrations and energy distributions of atoms, radicals, ions and electrons, and of determinations of the fields which control their behaviour. Optical diagnostics which can be used in real processing conditions are emphasized, and the limitations of the type of information which can be extracted from these are discussed. © 1995.
- Surface and Coatings Technology
- PART 1
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