Conference item
Infrared properties of ultrathin oxides on Si(100)
- Publication status:
- Published
Actions
Authors
- Host title:
- MICROELECTRONIC ENGINEERING
- Volume:
- 80
- Pages:
- 420-423
- Publication date:
- 2005-06-01
- DOI:
- ISSN:
-
0167-9317
- Keywords:
- Pubs id:
-
pubs:172990
- UUID:
-
uuid:3605e277-7303-469f-b652-126059a6a563
- Local pid:
-
pubs:172990
- Source identifiers:
-
172990
- Deposit date:
-
2012-12-19
Terms of use
- Copyright date:
- 2005
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