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Infrared properties of ultrathin oxides on Si(100)

Publication status:
Published

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Publisher copy:
10.1016/j.mee.2005.04.025

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Host title:
MICROELECTRONIC ENGINEERING
Volume:
80
Pages:
420-423
Publication date:
2005-06-01
DOI:
ISSN:
0167-9317


Keywords:
Pubs id:
pubs:172990
UUID:
uuid:3605e277-7303-469f-b652-126059a6a563
Local pid:
pubs:172990
Source identifiers:
172990
Deposit date:
2012-12-19

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