- Abstract:
-
We consider the dynamics of overdamped MEMS devices undergoing the pull-in instability. Numerous previous experiments and numerical simulations have shown a significant increase in the pull-in time under DC voltages close to the pull-in voltage. Here the transient dynamics slow down as the device passes through a meta-stable or bottleneck phase, but this slowing down is not well understood quantitatively. Using a lumped parallel-plate model, we perform a detailed analysis of the pull-in dynam...
Expand abstract - Publication status:
- Published
- Peer review status:
- Peer reviewed
- Version:
- Accepted Manuscript
- Files:
-
-
(pdf, 2.3MB)
-
- Publisher copy:
- 10.1088/1361-6439/aa9a70
-
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- Publisher:
- IOP Publishing Publisher's website
- Journal:
- Journal of Micromechanics and Microengineering Journal website
- Volume:
- 28
- Issue:
- 1
- Pages:
- 015006
- Publication date:
- 2017-12-12
- Acceptance date:
- 2017-11-14
- DOI:
- EISSN:
-
1361-6439
- ISSN:
-
0960-1317
- Pubs id:
-
pubs:742591
- URN:
-
uri:2d402c57-8e03-44b3-ba85-fd992f0b6560
- UUID:
-
uuid:2d402c57-8e03-44b3-ba85-fd992f0b6560
- Local pid:
- pubs:742591
- Paper number:
- 1
- Keywords:
- Copyright holder:
- IOP Publishing Ltd
- Copyright date:
- 2017
- Notes:
-
Copyright © 2017 IOP Publishing Ltd. This is the accepted manuscript version of the article. The final version is available online from IOP Publishing at: https://doi.org/10.1088/1361-6439/aa9a70
Journal article
Delayed pull-in transitions in overdamped MEMS devices
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