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Delayed pull-in transitions in overdamped MEMS devices

Abstract:

We consider the dynamics of overdamped MEMS devices undergoing the pull-in instability. Numerous previous experiments and numerical simulations have shown a significant increase in the pull-in time under DC voltages close to the pull-in voltage. Here the transient dynamics slow down as the device passes through a meta-stable or bottleneck phase, but this slowing down is not well understood quantitatively. Using a lumped parallel-plate model, we perform a detailed analysis of the pull-in dynam...

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Publication status:
Published
Peer review status:
Peer reviewed
Version:
Accepted Manuscript

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Publisher copy:
10.1088/1361-6439/aa9a70

Authors


More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Mathematical Institute
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Mathematical Institute
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Mathematical Institute
Oxford college:
Lincoln College
Role:
Author
Publisher:
IOP Publishing Publisher's website
Journal:
Journal of Micromechanics and Microengineering Journal website
Volume:
28
Issue:
1
Pages:
015006
Publication date:
2017-12-12
Acceptance date:
2017-11-14
DOI:
EISSN:
1361-6439
ISSN:
0960-1317
Pubs id:
pubs:742591
URN:
uri:2d402c57-8e03-44b3-ba85-fd992f0b6560
UUID:
uuid:2d402c57-8e03-44b3-ba85-fd992f0b6560
Local pid:
pubs:742591
Paper number:
1

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