Conference item
Experimental Setup for Energy-Filtered Scanning Confocal Electron Microscopy (EFSCEM) in a Double Aberration-Corrected Transmission Electron Microscope
- Abstract:
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Scanning confocal electron microscopy (SCEM) is a new imaging mode in electron microscopy. Spherical aberration corrected electron microscope instruments fitted with two aberration correctors can be used in this mode which provides improved depth resolution and selectivity compared to optical sectioning in a conventional scanning transmission geometry. In this article, we consider a confocal optical configuration for SCEM using inelastically scattered electrons. We lay out the necessary steps...
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- Publication status:
- Published
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- Publisher copy:
- 10.1088/1742-6596/241/1/012012
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Bibliographic Details
- Volume:
- 241
- Pages:
- 012012-012012
- Host title:
- ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2009 (EMAG 2009)
- Publication date:
- 2010-01-01
- DOI:
- EISSN:
-
1742-6596
- ISSN:
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1742-6588
- Source identifiers:
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124571
Item Description
- Pubs id:
-
pubs:124571
- UUID:
-
uuid:1e758824-364a-4b34-b18c-645d856d9b2b
- Local pid:
- pubs:124571
- Deposit date:
- 2012-12-19
Terms of use
- Copyright date:
- 2010
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