Conference item icon

Conference item

Experimental Setup for Energy-Filtered Scanning Confocal Electron Microscopy (EFSCEM) in a Double Aberration-Corrected Transmission Electron Microscope

Abstract:

Scanning confocal electron microscopy (SCEM) is a new imaging mode in electron microscopy. Spherical aberration corrected electron microscope instruments fitted with two aberration correctors can be used in this mode which provides improved depth resolution and selectivity compared to optical sectioning in a conventional scanning transmission geometry. In this article, we consider a confocal optical configuration for SCEM using inelastically scattered electrons. We lay out the necessary steps...

Expand abstract
Publication status:
Published

Actions


Access Document


Authors


More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Role:
Author
Volume:
241
Pages:
012012-012012
Host title:
ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2009 (EMAG 2009)
Publication date:
2010-01-01
DOI:
EISSN:
1742-6596
ISSN:
1742-6588
Source identifiers:
124571
Pubs id:
pubs:124571
UUID:
uuid:1e758824-364a-4b34-b18c-645d856d9b2b
Local pid:
pubs:124571
Deposit date:
2012-12-19

Terms of use


Views and Downloads






If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP