Conference icon

Conference

DISLOCATION IMAGING WITH A SCANNING PROTON MICROPROBE USING CHANNELING SCANNING-TRANSMISSION ION MICROSCOPY (CSTIM)

Abstract:

Scanning transmission ion microscopy (STIM) combined with channeling has previously been demonstrated to be able to map regions of relatively poor crystal quality due to beam induced damage [1,2]. This paper describes the implementation of the CSTIM technique on the Oxford scanning proton microprobe and its ability to image misfit dislocations at the interface of an epitaxial Si0.85Ge0.15 layer grown on a (001) silicon substrate. Proton energy loss maps are generated by detecting transmitted ...

Expand abstract
Publication status:
Published

Actions


Access Document


Authors


Expand authors...
Volume:
77
Issue:
1-4
Pages:
320-331
Publication date:
1993-05-05
DOI:
ISSN:
0168-583X
URN:
uuid:17e2b128-e2fc-4d27-9b40-d683438226b9
Source identifiers:
24178
Local pid:
pubs:24178

Terms of use


Metrics


Views and Downloads






If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP