Journal article
ANALYTICAL MODELING OF NONLINEAR DIFFUSION OF ARSENIC IN SILICON
- Publication status:
- Published
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- Publisher copy:
- 10.1149/1.2100877
Authors
- Journal:
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY More from this journal
- Volume:
- 134
- Issue:
- 9
- Pages:
- 2316-2319
- Publication date:
- 1987-09-01
- DOI:
- ISSN:
-
0013-4651
- Pubs id:
-
pubs:357683
- UUID:
-
uuid:15cfbc31-0e0c-484a-a064-3ebf164f8648
- Local pid:
-
pubs:357683
- Source identifiers:
-
357683
- Deposit date:
-
2013-11-16
- ARK identifier:
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- Copyright date:
- 1987
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