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Journal article

ANALYTICAL MODELING OF NONLINEAR DIFFUSION OF ARSENIC IN SILICON

Publication status:
Published

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Publisher copy:
10.1149/1.2100877

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Journal:
JOURNAL OF THE ELECTROCHEMICAL SOCIETY More from this journal
Volume:
134
Issue:
9
Pages:
2316-2319
Publication date:
1987-09-01
DOI:
ISSN:
0013-4651


Pubs id:
pubs:357683
UUID:
uuid:15cfbc31-0e0c-484a-a064-3ebf164f8648
Local pid:
pubs:357683
Source identifiers:
357683
Deposit date:
2013-11-16
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