Growth and characterization of transparent metal oxide and oxynitride gas barrier films on polymer substrates

Journal article

In the food packaging industry, use of transparent metal oxide thin films deposited on polymer substrates is growing rapidly, primarily due to the good gas barrier properties these materials possess. Of the most widely used deposition techniques, reactive magnetron sputtering has been shown to produce excellent gas barrier coatings with very few pinhole type defects, leading to the intrinsic structure of the coating being the dominant factor in controlling the gas permeation through these films. In this study, traditional coatings such as AlOx along with compositionally modified coatings such as AlOxNy have been deposited on polyethylene tere.

Authors: Erlat, A; Henry, B; Howson, R; Grovenor, C; Briggs, G

• Journal: Proceedings, Annual Technical Conference - Society of Vacuum Coaters
• Pages: 448-454
• Publication date: 2001-01-01
• ISSN: 0737-5921
• Language: English
• Keywords: Water vapor transport; Gas barrier; Plasma treatment; Aluminium oxynitride (AlOxNy)