Journal article
Cryogenic two-photon laser photolithography with SU-8
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- Publisher copy:
- 10.1063/1.2194311
Authors
- Journal:
- APPLIED PHYSICS LETTERS More from this journal
- Volume:
- 88
- Issue:
- 14
- Publication date:
- 2006-04-03
- DOI:
- ISSN:
-
0003-6951
- Pubs id:
-
pubs:13537
- UUID:
-
uuid:157351e5-1871-4f81-a934-977ab3f33fb1
- Local pid:
-
pubs:13537
- Source identifiers:
-
13537
- Deposit date:
-
2012-12-19
- ARK identifier:
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- Copyright date:
- 2006
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