Conference item
EMISSION CHARACTERISTICS AND MORPHOLOGY OF WET ETCHED CATHODES IN P-TYPE SILICON
- Publication status:
- Published
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- Publisher copy:
- 10.1116/1.586872
Authors
- Journal:
- JOURNAL OF VACUUM SCIENCE and TECHNOLOGY B More from this journal
- Volume:
- 11
- Issue:
- 2
- Pages:
- 412-415
- Publication date:
- 1993-01-01
- Event title:
- 5TH INTERNATIONAL VACUUM MICROELECTRONICS CONF
- DOI:
- ISSN:
-
1071-1023
- Keywords:
- Pubs id:
-
pubs:28206
- UUID:
-
uuid:143c73a1-66ff-479b-902e-d11badb57255
- Local pid:
-
pubs:28206
- Source identifiers:
-
28206
- Deposit date:
-
2012-12-19
- ARK identifier:
Terms of use
- Copyright date:
- 1993
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