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EMISSION CHARACTERISTICS AND MORPHOLOGY OF WET ETCHED CATHODES IN P-TYPE SILICON

Publication status:
Published

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Publisher copy:
10.1116/1.586872
Journal:
JOURNAL OF VACUUM SCIENCE and TECHNOLOGY B
Volume:
11
Issue:
2
Pages:
412-415
Publication date:
1993-01-01
Event title:
5TH INTERNATIONAL VACUUM MICROELECTRONICS CONF
DOI:
ISSN:
1071-1023
Keywords:
Pubs id:
pubs:28206
UUID:
uuid:143c73a1-66ff-479b-902e-d11badb57255
Local pid:
pubs:28206
Source identifiers:
28206
Deposit date:
2012-12-19

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