- Abstract:
- The reactions of trimethylaluminium leading to the deposition of Al on Si have been studied using LEED, XPS, AES, TDS and molecular beam scattering. Trimethylaluminium is shown to chemisorb on Si(100) subsequently decomposing to produce CH4(g) and contaminated Al layers. Al catalyses the decomposition reaction and opens up a new reaction channel, resulting in the evolution of C2H2(g).
- Publisher copy:
- 10.1088/0953-8984/1/SB/025
-
Version unsuitable
-
We have not obtained a suitable full-text for a given research output. See this page for more information.
-
Recently completed
-
Sometimes content is held in ORA but is unavailable for a fixed period of time to comply with the policies and wishes of rights holders.
-
Permissions
-
All content made available in ORA should comply with relevant rights, such as copyright. See this page for more information.
-
Clearance
-
Some thesis volumes scanned as part of the digitisation scheme funded by Dr Leonard Polonsky are currently unavailable due to sensitive material or uncleared third-party copyright content. We are attempting to contact authors whose theses are affected.
- Journal:
- Journal of Physics: Condensed Matter
- Volume:
- 1
- Issue:
- SB
- Pages:
- SB145-SB148
- Publication date:
- 1989
- DOI:
- EISSN:
-
1361-648X
- ISSN:
-
0953-8984
- URN:
-
uuid:11ac42fa-69bb-4cdb-ad2f-e9d2e0b189ff
- Source identifiers:
-
94419
- Local pid:
- pubs:94419
- Language:
- English
- Copyright date:
- 1989
Journal article
Surface spectroscopic and molecular beam studies of the reactions of trimethylaluminium on Si(100)
Actions
Access Document
Why is the content I wish to access not available via ORA?
Bibliographic data (the information relating to research outputs) and full-text items (e.g. articles, theses, reports, etc.) arrive in ORA from several different sources. Unfortunately we are not able to make available the full-text for every research output.
Please contact the ORA team (
) if you have queries regarding unavailable content OR if you are aware of a full-text copy we can make available.
) if you have queries regarding unavailable content OR if you are aware of a full-text copy we can make available.
Content may be unavailable for the following four reasons
Alternative access to the full-text
You may be able to access the full-text directly from the publisher's website using the 'Publisher Copy' link in the 'Links & Downloads' box from a research output's ORA record page. This method may require an institutional or individual subscription to the journal/resource.
Authors
Bibliographic Details
Item Description
Terms of use
Metrics
Altmetrics
Dimensions
If you are the owner of this record, you can report an update to it here: Report update to this record