Journal article

Surface spectroscopic and molecular beam studies of the reactions of trimethylaluminium on Si(100)

Abstract:: The reactions of trimethylaluminium leading to the deposition of Al on Si have been studied using LEED, XPS, AES, TDS and molecular beam scattering. Trimethylaluminium is shown to chemisorb on Si(100) subsequently decomposing to produce CH4(g) and contaminated Al layers. Al catalyses the decomposition reaction and opens up a new reaction channel, resulting in the evolution of C2H2(g).

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APA Style

Wee, A., Jackman, R., Price, R., & Foord, J. (1989). Surface spectroscopic and molecular beam studies of the reactions of trimethylaluminium on Si(100). Journal of Physics: Condensed Matter, 1(SB), SB145–SB148.

MLA Style

Wee, A, et al. “Surface Spectroscopic and Molecular Beam Studies of the Reactions of Trimethylaluminium on Si(100).” Journal of Physics: Condensed Matter, vol. 1, no. SB, 1989, pp. SB145–SB148.

Chicago Style

Wee, A, R Jackman, R Price, and J Foord. 1989. “Surface Spectroscopic and Molecular Beam Studies of the Reactions of Trimethylaluminium on Si(100).” Journal of Physics: Condensed Matter 1 (SB): SB145–SB148.
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Publisher copy:: 10.1088/0953-8984/1/SB/025

Authors

+ Wee, A More by this author

Role:: Author

+ Jackman, R More by this author

Role:: Author

+ Price, R More by this author

Role:: Author

+ Foord, J More by this author

Institution:: University of Oxford
Division:: MPLS
Department:: Chemistry
Sub department:: Physical & Theoretical Chem
Role:: Author

Journal:: Journal of Physics: Condensed Matter More from this journal
Volume:: 1
Issue:: SB
Pages:: SB145-SB148
Publication date:: 1989-01-01
DOI:: 10.1088/0953-8984/1/SB/025
EISSN:: 1361-648X
ISSN:: 0953-8984

Language:: English
Pubs id:: pubs:94419
UUID:: uuid:11ac42fa-69bb-4cdb-ad2f-e9d2e0b189ff
Local pid:: pubs:94419
Source identifiers:: 94419
Deposit date:: 2012-12-20
ARK identifier:: ark:/29072/ora_11ac42fa69bb4cdbad2fe9d2e0b189ff

Terms of use

Copyright date:: 1989

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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