Journal article

Deposition of SrZrO3 thin films using liquid delivery metal-organic chemical vapor deposition

Abstract:: Proton-conductive SrZrO3 films were successfully deposited on Pt/SiOx/Si and porous stainless-steel substrates by liquid delivery metalorganic chemical vapor deposition (LD-MOCVD). The as-deposited films deposited on the Pt/SiOx/Si substrate at 600 °C showed good crystallinity and post-annealing at temperatures below 800 °C resulted in improved crystallinity. A 200-nm-thick film deposited on the porous stainless-steel substrate was flat and solid and did not show any gas leakage. We consider this deposition technique to be applicable for the fabrication of a new solid oxide fuel cell structure with intermediate-temperature operation. © 2009 The Japan Society of Applied Physics.

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APA Style

Uchiyama, K., Sakairi, H., Shiosaki, T., Kariya, T., Ikeda, H., Yanagimoto, K., Yamada, Y., & Nakayama, A. (2009). Deposition of SrZrO3 thin films using liquid delivery metal-organic chemical vapor deposition. Japanese Journal of Applied Physics, 48(7 PART 1), 070205–070205.

MLA Style

Uchiyama, K., et al. “Deposition of SrZrO3 Thin Films Using Liquid Delivery Metal-Organic Chemical Vapor Deposition.” Japanese Journal of Applied Physics, vol. 48, no. 7 PART 1, 2009, pp. 070205–05.

Chicago Style

Uchiyama, K, H Sakairi, T Shiosaki, T Kariya, H Ikeda, K Yanagimoto, Y Yamada, and A Nakayama. 2009. “Deposition of SrZrO3 Thin Films Using Liquid Delivery Metal-Organic Chemical Vapor Deposition.” Japanese Journal of Applied Physics 48 (7 PART 1): 070205–.
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Publisher copy:: 10.1143/JJAP.48.070205

Authors

+ Uchiyama, K More by this author

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+ Sakairi, H More by this author

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+ Shiosaki, T More by this author

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+ Kariya, T More by this author

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+ Ikeda, H More by this author

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Journal:: Japanese Journal of Applied Physics More from this journal
Volume:: 48
Issue:: 7 PART 1
Pages:: 070205-070205
Publication date:: 2009-07-01
DOI:: 10.1143/JJAP.48.070205
EISSN:: 1347-4065
ISSN:: 0021-4922

Language:: English
Pubs id:: pubs:297303
UUID:: uuid:110596b0-3d2c-4d43-9bb9-aa4a3a2c8f7e
Local pid:: pubs:297303
Source identifiers:: 297303
Deposit date:: 2013-11-17

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Copyright date:: 2009

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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