- Abstract:
-
With the increasing interest in nanostructures and thin films, the need for a quantitative measuring method for elastic constants on the nanometer scale has become more evident. The fundamental physical quantity characterizing the elastic constants is the acoustic phase velocity. Due to the strong localization of surface acoustic waves (SAWs) in the near-surface region, SAWs are particularly favored for such investigations. The velocity measurement is commonly performed by time delay and acou...
Expand abstract - Publication status:
- Published
- Publisher copy:
- 10.1007/s003390051134
-
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- Journal:
- APPLIED PHYSICS A-MATERIALS SCIENCE and PROCESSING
- Volume:
- 66
- Issue:
- SUPPL. 1
- Pages:
- S223-S226
- Publication date:
- 1998-03-05
- DOI:
- EISSN:
-
1432-0630
- ISSN:
-
0947-8396
- URN:
-
uuid:0f9bbdaa-78ae-48f2-8305-10bbc5b1d899
- Source identifiers:
-
151516
- Local pid:
- pubs:151516
- Language:
- English
- Copyright date:
- 1998
Journal article
Acoustic phase velocity measurements with nanometer resolution by scanning acoustic force microscopy
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