Journal article
Acoustic phase velocity measurements with nanometer resolution by scanning acoustic force microscopy
- Abstract:
-
With the increasing interest in nanostructures and thin films, the need for a quantitative measuring method for elastic constants on the nanometer scale has become more evident. The fundamental physical quantity characterizing the elastic constants is the acoustic phase velocity. Due to the strong localization of surface acoustic waves (SAWs) in the near-surface region, SAWs are particularly favored for such investigations. The velocity measurement is commonly performed by time delay and acou...
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- Publication status:
- Published
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Bibliographic Details
- Journal:
- APPLIED PHYSICS A-MATERIALS SCIENCE and PROCESSING
- Volume:
- 66
- Issue:
- SUPPL. 1
- Pages:
- S223-S226
- Publication date:
- 1998-03-01
- DOI:
- EISSN:
-
1432-0630
- ISSN:
-
0947-8396
- Source identifiers:
-
151516
Item Description
- Language:
- English
- Pubs id:
-
pubs:151516
- UUID:
-
uuid:0f9bbdaa-78ae-48f2-8305-10bbc5b1d899
- Local pid:
- pubs:151516
- Deposit date:
- 2012-12-19
Terms of use
- Copyright date:
- 1998
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