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Toward electron exit wave tomography of amorphous materials at atomic resolution

Abstract:

We suggest to use electron exit wave phase for tomographic reconstruction of structure of Au-doped amorphous Si with atomic resolution. In the present theoretical investigation into the approach it is found that the number of projections and the accuracy of defocus in the focal series restoration are the main factors that contribute to the final resolution. Although resolution is ultimately limited by these factors, phase shifts in the exit wave are sufficient to identify the position of Au a...

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Journal:
Journal of Alloys and Compounds More from this journal
Volume:
536
Issue:
SUPPL.1
Publication date:
2012-09-25
DOI:
ISSN:
0925-8388
Language:
English
Keywords:
Pubs id:
pubs:351157
UUID:
uuid:0b9a62d2-ff83-419d-9da3-58e10ce04e77
Local pid:
pubs:351157
Source identifiers:
351157
Deposit date:
2013-11-17

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