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Journal article

Three-dimensional optical lithography for photonic microstructures

Abstract:

A rapid and flexible technique for optical fabrication by creating a device embedded in, and in registration with, a 3D photonic crystal using holographic lithography to define the underlying periodic microstructure was demonstrated. The new optical lithography techniques are intrinsically well adapted to 3D photonic-crystal device fabrication and uses a 3D interface pattern created at the intersection of four laser beams. It has been shown that by imaging the distribution of photo-chemical c...

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Publication status:
Published

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Publisher copy:
10.1002/adma.200502286

Authors


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Institution:
University of Oxford
Division:
MPLS
Department:
Physics
Role:
Author
Journal:
ADVANCED MATERIALS More from this journal
Volume:
18
Issue:
12
Pages:
1557-+
Publication date:
2006-06-19
DOI:
EISSN:
1521-4095
ISSN:
0935-9648
Language:
English
Pubs id:
pubs:20129
UUID:
uuid:07c7b5d1-9fec-4b9a-a7ce-62594b528b00
Local pid:
pubs:20129
Source identifiers:
20129
Deposit date:
2012-12-19

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